Miniaturized fluxgate sensor cores Advanced materials (VITROVAC 6025F, Co-Zr-Ta) Thickness 0,025 mm These sensors can be used in various applications (e.g. navigation, geophysics, industrial automation).
The new technology of laser cutting, drilling and micromachining of semiconductors used in sensors: – Process without affecting sensor characteristics such as leakage current – The ability to process the sensor on the entire assembly (ROC+Sensor) without damaging neighbouring pixels – The thickness of the machined material from 100, 300 to 500 µm – The possibility of arbitrary sensor shape …
Precise cutting with minimal heat affected zone High demands on dimensions (tolerances +/- 5µm)