Micromachining of semiconductors
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Čvn
The new technology of laser cutting, drilling and micromachining of semiconductors used in sensors: – Process without affecting sensor characteristics such as leakage current – The ability to process the sensor on the entire assembly (ROC+Sensor) without damaging neighbouring pixels – The thickness of the machined material from 100, 300 to 500 µm – The possibility of arbitrary sensor shape …